JPH0151132B2 - - Google Patents
Info
- Publication number
- JPH0151132B2 JPH0151132B2 JP58172296A JP17229683A JPH0151132B2 JP H0151132 B2 JPH0151132 B2 JP H0151132B2 JP 58172296 A JP58172296 A JP 58172296A JP 17229683 A JP17229683 A JP 17229683A JP H0151132 B2 JPH0151132 B2 JP H0151132B2
- Authority
- JP
- Japan
- Prior art keywords
- sensor
- air flow
- film
- mass
- resistor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910052751 metal Inorganic materials 0.000 claims description 19
- 239000002184 metal Substances 0.000 claims description 19
- 238000001816 cooling Methods 0.000 claims description 9
- 238000011144 upstream manufacturing Methods 0.000 claims description 5
- 230000000694 effects Effects 0.000 claims description 4
- 230000001419 dependent effect Effects 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims description 2
- 239000003570 air Substances 0.000 description 54
- 239000010408 film Substances 0.000 description 45
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical group [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 8
- 229910052802 copper Inorganic materials 0.000 description 7
- 239000010949 copper Substances 0.000 description 7
- 239000012080 ambient air Substances 0.000 description 5
- 230000008859 change Effects 0.000 description 5
- 239000000428 dust Substances 0.000 description 4
- 229920003223 poly(pyromellitimide-1,4-diphenyl ether) Polymers 0.000 description 4
- 238000011109 contamination Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 229910000679 solder Inorganic materials 0.000 description 3
- 206010016754 Flashback Diseases 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 125000003118 aryl group Chemical group 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 239000011889 copper foil Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000010970 precious metal Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000001012 protector Effects 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6842—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
- G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
- G01F1/692—Thin-film arrangements
Landscapes
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Volume Flow (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US419937 | 1982-09-20 | ||
| US06/419,937 US4433576A (en) | 1982-09-20 | 1982-09-20 | Mass airflow sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5975120A JPS5975120A (ja) | 1984-04-27 |
| JPH0151132B2 true JPH0151132B2 (en]) | 1989-11-01 |
Family
ID=23664369
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58172296A Granted JPS5975120A (ja) | 1982-09-20 | 1983-09-20 | 空気質量流量センサ |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US4433576A (en]) |
| EP (1) | EP0106455B1 (en]) |
| JP (1) | JPS5975120A (en]) |
| CA (1) | CA1197706A (en]) |
| DE (1) | DE3363402D1 (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017096855A (ja) * | 2015-11-26 | 2017-06-01 | 日立オートモティブシステムズ株式会社 | 物理量検出装置 |
Families Citing this family (34)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4677850A (en) * | 1983-02-11 | 1987-07-07 | Nippon Soken, Inc. | Semiconductor-type flow rate detecting apparatus |
| JPH0797113B2 (ja) * | 1983-06-17 | 1995-10-18 | アンステイテユ・ド・ルシエルシエ・エ・ド・デブロプマン・アエロロジク、マルクタン・ソシエテ・アノニム | 風向き及び風速測定方法並びに装置 |
| JPS60151517A (ja) * | 1984-01-18 | 1985-08-09 | Nippon Soken Inc | 半導体式流量検出装置 |
| DE3604202C2 (de) * | 1985-02-14 | 1997-01-09 | Nippon Denso Co | Direkt beheizte Strömungsmeßvorrichtung |
| JPS61274222A (ja) * | 1985-05-30 | 1986-12-04 | Sharp Corp | 流量センサ |
| US4635475A (en) * | 1985-10-31 | 1987-01-13 | General Motors Corporation | Hot element mass airflow sensor |
| DE3542788A1 (de) * | 1985-12-04 | 1987-06-19 | Degussa | Vorrichtung zur thermischen massenstrommessung von gasen und fluessigkeiten |
| US4779458A (en) * | 1986-12-29 | 1988-10-25 | Mawardi Osman K | Flow sensor |
| US4776213A (en) * | 1987-03-18 | 1988-10-11 | Ford Motor Company | Mass airflow meter |
| US4823462A (en) * | 1987-04-14 | 1989-04-25 | Hilex Poly Company, Inc. | Mass air flow sensor assembly and method of manufacture |
| US5000039A (en) * | 1989-11-21 | 1991-03-19 | Siemens-Bendix Automotive Electronics L.P. | Mass air flow integrator |
| JP2524144Y2 (ja) * | 1989-12-18 | 1997-01-29 | 三菱電機株式会社 | 感熱式流量センサ |
| US5484517A (en) * | 1994-03-08 | 1996-01-16 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Method of forming multi-element thin hot film sensors on polyimide film |
| US5837903A (en) * | 1995-09-22 | 1998-11-17 | The Scott Fetzer Company Inc. | Device for measuring exhaust flowrate using laminar flow element |
| IT1287889B1 (it) * | 1996-01-19 | 1998-08-26 | Biomedin Srl | Dispositivo con piccola capacita' termica per spirometria portabile di precisione e per altre applicazioni |
| US6631716B1 (en) * | 1998-07-17 | 2003-10-14 | The Board Of Trustees Of The Leland Stanford Junior University | Dynamic respiratory control |
| JP3475853B2 (ja) * | 1998-12-21 | 2003-12-10 | 三菱電機株式会社 | 流量測定装置 |
| DE19942502A1 (de) * | 1999-09-07 | 2001-03-08 | Bosch Gmbh Robert | Vorrichtung zur Messung von zumindest einem Parameter eines in einer Leitung strömenden Mediums |
| DE19942501A1 (de) * | 1999-09-07 | 2001-03-29 | Bosch Gmbh Robert | Vorrichtung zur Messung von zumindest einem Parameter eines in einer Leitung strömenden Mediums |
| DE19942511B4 (de) * | 1999-09-07 | 2005-07-14 | Robert Bosch Gmbh | Vorrichtung zur Messung wenigstens eines Parameters eines strömenden Mediums |
| DE10011709A1 (de) | 2000-03-10 | 2001-09-13 | Bosch Gmbh Robert | Vorrichtung zur Messung von zumindest einem Parameter eines in einer Leitung strömenden Mediums |
| DE10015918A1 (de) * | 2000-03-30 | 2001-10-04 | Bosch Gmbh Robert | Vorrichtung zur Bestimmung von zumindest einem Parameter eines in einer Leitung strömenden Mediums |
| DE10035054C1 (de) * | 2000-07-19 | 2001-10-25 | Draeger Medical Ag | Atemstromsensor |
| US7016790B2 (en) * | 2002-10-23 | 2006-03-21 | Taiwan Semiconductor Manufacturing Co., Ltd. | In-line hot-wire sensor for slurry monitoring |
| US7047805B2 (en) | 2004-04-09 | 2006-05-23 | Visteon Global Technologies, Inc. | Fluid flow meter having an auxiliary flow passage |
| JP4826140B2 (ja) * | 2005-05-30 | 2011-11-30 | 株式会社デンソー | 流量測定装置 |
| US7555945B2 (en) * | 2006-08-14 | 2009-07-07 | Board Of Trustees Of Michigan State University | Mass air flow sensor having off axis converging and diverging nozzles |
| US20080190214A1 (en) * | 2007-02-08 | 2008-08-14 | Pratt & Whitney Rocketdyne, Inc. | Cut-back flow straightener |
| US20090320608A1 (en) * | 2007-02-08 | 2009-12-31 | Pratt & Whitney Rocketdyne, Inc. | Tapered, frequency-tuned rotor for turbine flow meter |
| US7905153B2 (en) * | 2009-04-24 | 2011-03-15 | Mann+Hummel Gmbh | Flow vortex suppression apparatus for a mass air flow sensor |
| US20110048564A1 (en) * | 2009-08-25 | 2011-03-03 | Fluid Components International Llc | Fluid flow conditioner |
| DE102010055115B4 (de) * | 2010-11-16 | 2018-07-19 | Diehl Metering Gmbh | Durchflusssensor zum Einsetzen in eine Messstrecke |
| JP6172475B2 (ja) * | 2015-02-18 | 2017-08-02 | Smc株式会社 | 熱式フローセンサ |
| JP6690899B2 (ja) * | 2015-06-29 | 2020-04-28 | 株式会社デンソー | 空気流量測定装置 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2870305A (en) | 1955-04-04 | 1959-01-20 | Ling Sung-Ching | Constructions for anemometers of the hot wire type |
| US3900819A (en) * | 1973-02-07 | 1975-08-19 | Environmental Instruments | Thermal directional fluid flow transducer |
| US3931736A (en) * | 1974-06-28 | 1976-01-13 | Rca Corporation | Improved fluid flow sensor configuration |
| DE2728060A1 (de) | 1977-06-22 | 1979-01-18 | Bosch Gmbh Robert | Messonde mit temperaturabhaengigem widerstand zur mengenmessung |
| JPS6047462B2 (ja) * | 1978-06-02 | 1985-10-22 | 株式会社日立製作所 | 電子制御燃料噴射装置の吸入空気量計測装置 |
| EP0008185B1 (en) * | 1978-08-05 | 1983-06-08 | Nissan Motor Co., Ltd. | Flowmeter of hot wire type |
| DE2900220A1 (de) | 1979-01-04 | 1980-07-17 | Bosch Gmbh Robert | Vorrichtung zur messung der masse eines stroemenden mediums |
| DE2900210A1 (de) | 1979-01-04 | 1980-07-17 | Bosch Gmbh Robert | Vorrichtung zur messung der masse eines stroemenden mediums |
| DE2925975A1 (de) * | 1979-06-27 | 1981-01-15 | Siemens Ag | Mengendurchflussmesser |
-
1982
- 1982-09-20 US US06/419,937 patent/US4433576A/en not_active Expired - Fee Related
-
1983
- 1983-04-15 CA CA000425930A patent/CA1197706A/en not_active Expired
- 1983-08-18 DE DE8383304776T patent/DE3363402D1/de not_active Expired
- 1983-08-18 EP EP83304776A patent/EP0106455B1/en not_active Expired
- 1983-09-20 JP JP58172296A patent/JPS5975120A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017096855A (ja) * | 2015-11-26 | 2017-06-01 | 日立オートモティブシステムズ株式会社 | 物理量検出装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| EP0106455B1 (en) | 1986-05-07 |
| US4433576A (en) | 1984-02-28 |
| JPS5975120A (ja) | 1984-04-27 |
| CA1197706A (en) | 1985-12-10 |
| EP0106455A1 (en) | 1984-04-25 |
| DE3363402D1 (en) | 1986-06-12 |
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